Introduction to microsystem technology : a guide for students / Gerald Gerlach, Wolfram Dötzel ; translated by Dörte Müller

Author(s): Gerlach, Gerald
Location:
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Subjects: Microelectromechanical systems--Design and construction
System design
Microelectronics
Formats: Print
Material Type: Books
Language: English, German (translated from), Translation from German
Audience: Unspecified
Published: Chichester, England ; Hoboken, NJ : J. Wiley & Sons, c2008
Series: Wiley microsystem and nanotechnology series
LC Classification: T, TK
Alternate Title(s): Einführung in die Mikrosystemtechnik.
Additional Authors: Dötzel, Wolfram
Notes: LCCN: 2007050172
ISBN: 9780470058619 (cloth)
ISBN: 0470058617 (cloth)
Includes bibliographical references and index
Translated from the German
Physical Description: xxiii, 351 p. : ill. ; 26 cm
OCLC Number: 154798526
ISBN/ISSN: 9780470058619
0470058617

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